Light Source Device for Semiconductor Lithography

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posted on 2023-05-25, 06:59 authored by Onishi, M, Hugrass, W

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History

Department/School

School of Information and Communication Technology

Repository Status

Restricted

Socio-economic Objectives

Integrated circuits and devices

Patent ID

2012-079857

Patent Application Number

2010-222493

Patent Territory

Japan

Usage metrics

University Of Tasmania

Categories

Plasma physics; fusion plasmas; electrical discharges

Keywords

No keyword provided

Licence

Exports